METHOD OF MANUFACTURING COLLECTIVE SUBSTRATE AND COLLECTIVE SUBSTRATE

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United States of America Patent

APP PUB NO 20220368301A1
SERIAL NO

17869970

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Abstract

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A method of manufacturing a collective substrate that includes: forming at least one first mark in or on a first main surface of a first substrate; joining the first main surface of the first substrate and a first main surface of a second substrate to each other; forming an opening in the second substrate such that the first mark is exposed therein; and forming a device portion in or on a second main surface of the second substrate while using the first mark as a reference.

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Patent Owner(s)

Patent OwnerAddress
MURATA MANUFACTURING CONAGAOKAKYO-SHI 26-10 TENJIN 2-CHOME KYOTO-FU 617-8555

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
FUKUMITSU, Masakazu Nagaokakyo-shi, JP 36 26
KAMOTO, Taku Nagaokakyo-shi, JP 10 81

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