HEATER PEDESTAL WITH IMPROVED UNIFORMITY
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United States of America Patent
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Issued Date -
Nov 17, 2022
app pub date -
Oct 8, 2021
filing date -
May 16, 2021
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Abstract
Some embodiments of the disclosure relate to methods of modifying a heater pedestal to improve temperature and thickness uniformity. Some embodiments of the disclosure relate to the modified heater pedestals with improved temperature and thickness uniformity. In some embodiments, the height of support mesas in different regions of the pedestal are modified to increase temperature uniformity. In some embodiments, the heater elements are moved above the vacuum channel and purge channel to increase temperature uniformity. In some embodiments, the edge ring is modified to be coplanar with the top of a supported substrate.
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