PHOTOMASK BLANK AND PHOTOMASK USING THE SAME
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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N/A
Issued Date -
Nov 3, 2022
app pub date -
Apr 26, 2022
filing date -
Apr 26, 2022
priority date (Note) -
Published
status (Latency Note)
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Importance

US Family Size
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Non-US Coverage
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Abstract
Disclosed is a photomask comprising: a transparent substrate; and a multi-layer light shielding pattern film disposed on the transparent substrate, wherein the multi-layer light shielding pattern film comprises: a first light shielding film; and a second light shielding film disposed on the first light shielding film and comprising a transition metal and at least one selected from the group consisting of oxygen and nitrogen, and wherein a surface roughness Wr of the measuring zone satisfies Equation 1 below:
First Claim
all claims..Other Claims data not available
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
SK ENPULSE CO LTD | PYEONGTAEK-SI GYEONGGI-DO 17784 |
International Classification(s)

- 2022 Application Filing Year
- G01B Class
- 1437 Applications Filed
- 599 Patents Issued To-Date
- 41.69 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
CHOI, Suk Young | Suwon-si, KR | 25 | 52 |
# of filed Patents : 25 Total Citations : 52 | |||
JEONG, Min Gyo | Suwon-si, KR | 24 | 0 |
# of filed Patents : 24 Total Citations : 0 | |||
KIM, Kyuhun | Suwon-si, KR | 17 | 2 |
# of filed Patents : 17 Total Citations : 2 | |||
KIM, Seong Yoon | Suwon-si, KR | 30 | 28 |
# of filed Patents : 30 Total Citations : 28 | |||
KIM, Suhyeon | Suwon-si, KR | 42 | 397 |
# of filed Patents : 42 Total Citations : 397 | |||
LEE, Hyung-joo | Suwon-si, KR | 41 | 577 |
# of filed Patents : 41 Total Citations : 577 | |||
SHIN, Inkyun | Suwon-si, KR | 30 | 6 |
# of filed Patents : 30 Total Citations : 6 | |||
SON, Sung Hoon | Suwon-si, KR | 29 | 107 |
# of filed Patents : 29 Total Citations : 107 |
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Patent Citation Ranking
- 0 Citation Count
- G01B Class
- 0 % this patent is cited more than
- 3 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
3.5 Year Payment | $1600.00 | $800.00 | $400.00 | May 3, 2026 |
7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | May 3, 2030 |
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | May 3, 2034 |
Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge - 3.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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