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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
ASM IP HOLDING B V	VERSTERKERSTRAAT 8 ALMERE 1322 AP

International Classification(s)

• C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
• H01J:ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
• B08B:CLEANING IN GENERAL; PREVENTION OF FOULING IN GENE....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Kuo, Ying-Shen	Chandler, US	2	0
Lunceford, Chad	Phoenix, US	1	0
M'Saad, Hichem	Paradise Valley, US	125	14393
Ma, Paul	Scottsdale, US	56	3689
Mishra, Amit	Tempe, US	83	244
Mousa, Moataz Bellah	Chandler, US	13	1564
Muhammad, Mustafa	Gilbert, US	5	270
Winkler, Jereld Lee	Gilbert, US	49	8307
Zhang, Shuaidi	Chandler, US	15	3

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
3.5 Year Payment	$1600.00	$800.00	$400.00	May 3, 2026
7.5 Year Payment	$3600.00	$1800.00	$900.00	May 3, 2030
11.5 Year Payment	$7400.00	$3700.00	$1850.00	May 3, 2034

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 3.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2022/0349,051

REACTOR SYSTEMS AND METHODS FOR CLEANING REACTOR SYSTEMS

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