A PROCESS AND APPARATUS FOR THE PREPARATION OF A BONDED SUBSTRATE

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United States of America Patent

APP PUB NO 20220340416A1
SERIAL NO

17761289

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Abstract

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The present invention relates to a process and apparatus for the preparation of a bonded substrate. More particularly, the present invention relates to a PDMS bonding apparatus. More specifically, the present invention relates to a PDMS bonding apparatus which uses plasma to bond PDMS to a substrate.

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Patent Owner(s)

Patent OwnerAddress
TOP TECHNOLOGY LTD10 SEOTAN 2-RO SEOTAN-MYEON PYEONGTAEK-SI GYEONGGI-DO 17701
SHERKIN TECHNOLOGIES LIMITED27 SORREL HEATH CLONSILLA DUBLIN 15

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KIM, Sangbae Hwaseong-si, KR 7 122
KIM, Yongtae Yongin-si, KR 54 386
LEE, Youngho Yongin-si, KR 38 216
O'SULLIVAN, Donal Dublin, IE 9 29

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