High uniformity telecentric illuminator

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11868049
APP PUB NO 20220334498A1
SERIAL NO

17718476

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Described is a telecentric illuminator that can be used, for example, in a mask aligner system for semiconductor wafer processing or as part of a solar simulator system for characterization of solar cells. The telecentric illuminator includes a tapered optic, a lens group having a plurality of lenses and an aperture stop, and a hybrid Fresnel lens. The Fresnel lens is disposed at a position along the optical axis of the telecentric illuminator to generate a telecentric image of the aperture stop at an illumination plane. The Fresnel lens may have a curved central portion and the aperture stop may be apodized to achieve desired illumination characteristics and improve the resolution of a mask aligner system.

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Patent Owner(s)

Patent OwnerAddress
INNOVATIONS IN OPTICS INC10K GILL STREET WOBURN MA 01801

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brukilacchio, Thomas J Reading, US 30 1473
Pierce, David W Reading, US 3 199

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