DEVICE FOR CLEANING A SURFACE IN THE INTERIOR OF AN OPTICAL SYSTEM

Number of patents in Portfolio can not be more than 2000

United States of America

SERIAL NO

17691667

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Abstract

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The present disclosure relates to a device for cleaning a surface in the interior of an optical system. The device includes a rod-shaped element. The rod-shaped element includes an imager configured to image contaminates on the surface, and a cleaner configured to remove contaminates from the surface. The device also includes a distance sensor that is configured to measure the distance between the surface and the end of the rod-shaped element. The device also includes a connection element configured to be secured at an opening of the optical system, and the connection element includes a guide element configured to guide the rod-shaped element.

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Patent Owner(s)

Patent OwnerAddress
ZEISS CARL SMT GMBHRUDOLF-EBER-STRASSE 2 73447 OBERKOCHEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
DIESCH, Jovana-Maria Neu-Ulm, DE 1 0
Petasch, Thomas Aalen, DE 24 150
Sigel, Benjamin Aalen, DE 10 45

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