Carrier for measurement and wafer transfer system including the same
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United States of America Patent
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Aug 22, 2023
Grant Date -
Sep 29, 2022
app pub date -
Oct 18, 2021
filing date -
Mar 29, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
A measurement carrier includes a housing having an internal space, and a flow-rate measuring device located within the internal space. A bottom surface of the housing includes a first inflow hole, a second inflow hole, and an outflow hole, which provide fluid communication between the internal space and an outer space. The flow-rate measuring device may include a first flow-rate measuring sensor in fluid communication with the first inflow hole, and a second flow-rate measuring sensor in fluid communication with the second inflow hole.
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