BERYLLIUM OXIDE PEDESTALS
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United States of America Patent
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Issued Date -
Sep 15, 2022
app pub date -
Aug 13, 2020
filing date -
Aug 15, 2019
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Abstract
A base plate containing a having a top and a bottom and comprising a beryllium oxide composition containing at least 95 wt % beryllium oxide and optionally fluorine/fluoride ion. The base plate demonstrates a clamping pressure of at least 133 kPa at a temperature of at least 600° C. and a bulk resistivity greater than 1×105 ohm-m at 800° C.
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