Control system and control method for controlling displacement of Base

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United States of America Patent

PATENT NO 12057790
APP PUB NO 20220286065A1
SERIAL NO

17670841

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Abstract

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A control system includes: a piezoelectric element having a deformation amount that varies according to a magnitude of a drive voltage applied to the piezoelectric element; a base on which the piezoelectric element is arranged; a deformation sensor configured to detect a displacement of the base caused by deformation of the piezoelectric element and output the displacement as a displacement signal; and a drive device configured to apply the drive voltage to the piezoelectric element while adjusting the magnitude of the drive voltage so as to reduce a difference between a value of the displacement signal and a value of a setting signal.

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Patent Owner(s)

Patent OwnerAddress
ROHM CO LTDKYOTO

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Naiki, Takashi Kyoto, JP 45 123

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