MICROMECHANICAL OSCILLATION SYSTEM
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United States of America Patent
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Sep 8, 2022
app pub date -
Oct 1, 2020
filing date -
Oct 21, 2019
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Abstract
A micromechanical oscillation system that is designed as a micromirror system. The micromechanical oscillation system includes a micromechanical oscillating body that includes at least one micromirror. The micromechanical oscillating body is designed to oscillate about an oscillation axis, in particular at a resonant frequency of the oscillating body. The micromechanical oscillating body has a total mass made up of mass elements. The mass elements are distributed as a function of a lateral horizontal spacing of the mass elements from the oscillation axis.
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