VIBRATING ELEMENT AND OSCILLATOR
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United States of America Patent
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Issued Date -
Aug 25, 2022
app pub date -
Feb 22, 2022
filing date -
Feb 25, 2021
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Abstract
A vibrating element includes a quartz crystal substrate having a first vibrating portion having a pair of first excitation electrodes, a second vibrating portion having a pair of second excitation electrodes, and a third vibration portion having a pair of third excitation electrodes, in which at least one second excitation electrode of the pair of second excitation electrodes is formed into a first inclined surface inclined with respect to both main surfaces of the quartz crystal substrate, and at least one third excitation electrode of the pair of third excitation electrodes is formed into a second inclined surface inclined with respect to both the main surfaces and the first inclined surface.
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