ACOUSTIC WAVE FILTER WITH MULTIPLE ACOUSTIC WAVE DEVICES ON A SUBTRATE
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United States of America Patent
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Issued Date -
Aug 25, 2022
app pub date -
Feb 16, 2022
filing date -
Feb 22, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
An acoustic wave filter includes a piezoelectric layer. A first acoustic wave device includes a portion of the piezoelectric layer and a first multi-layer interdigital transducer electrode disposed over the first portion of the piezoelectric layer. Additional acoustic wave devices are coupled to the first acoustic wave device, the additional acoustic wave devices including a second portion of the piezoelectric layer and a plurality of multi-layer interdigital transducer electrodes disposed over the second portion of the piezoelectric layer. At least one of the plurality of multi-layer interdigital transducer electrodes includes a layer that is thinner than a corresponding layer of the same material of the first multi-layer interdigital transducer electrode of the first acoustic wave device.
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