Cantilever, scanning probe microscope, and measurement method using scanning probe microscope

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United States of America Patent

PATENT NO 11733264
APP PUB NO 20220260611A1
SERIAL NO

17630698

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Abstract

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To enhance the measurement sensitivity of a scanning probe microscope. In a cross sectional view, a cantilever includes a vertex portion that is a portion close to a sample and is covered by a metallic film, a ridge that is connected to the vertex portion and is covered by the metallic film, and an upper corner portion that is connected to the ridge. Here, the upper corner portion and a part of the ridge are portions to be irradiated with excitation light emitted from a light source of the scanning probe microscope.

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Patent Owner(s)

Patent OwnerAddress
HITACHI HIGH-TECH CORPORATION17-1 TORANOMON 1-CHOME MINATO-KU TOKYO 105-6409

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hirose, Takenori Tokyo, JP 31 351
Saeki, Tomonori Tokyo, JP 20 122
Zhang, Kaifeng Tokyo, JP 20 57

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