Method for producing a cooling element, and cooling element produced using such a method
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United States of America Patent
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Issued Date -
Aug 4, 2022
app pub date -
Jul 7, 2020
filing date -
Jul 11, 2019
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Abstract
A method for manufacturing a cooling element (1) for an electrical or electronic component, in particular a semiconductor element, the manufactured cooling element (1) having a cooling fluid channel system through which a cooling fluid can be passed during operation, comprising
- providing at least a first metal layer (11)realizing at least one recess (21, 22) in the at least one first metal layer (11), andforming at least a partial section of the cooling fluid channel system by means of the at least one recess (21, 22),wherein at least a first part (21) of the at least one recess (21, 22) in the at least first metal layer (11) is realized by erosion, in particular spark erosion.
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