INSPECTION METHOD AND SYSTEM

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United States of America Patent

APP PUB NO 20220245780A1
SERIAL NO

17671522

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Abstract

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An inspection method includes the following steps: identifying a plurality of patterns within an image; and comparing the plurality of patterns with each other for measurement values thereof. The above-mentioned inspection method uses the pattern within the image as a basis for comparison; therefore, measurement values of the plurality of pixels constructing the pattern can be processed with statistical methods and then compared, and the false rate caused by variation of a few pixels is decreased significantly. An inspection system implementing the above-mentioned method is also disclosed.

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ASML NETHERLANDS B VDE RUN 6501 VELDHOVEN NL-5504 DR

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
FANG, Wei Milpitas, US 197 903
JAU, Jack Los Altos Hills, US 55 721
ZHANG, Zhao-Li San Jose, US 13 56

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