Method for electrically examining electronic components of an integrated circuit

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United States of America Patent

PATENT NO 12007408
APP PUB NO 20220244290A1
SERIAL NO

17295052

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Abstract

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A method is provided for electrically examining electronic components of an integrated circuit including a target region to be examined in which electronic components with contact points are located and further including a remaining, non-target region. The method includes performing an examination with a combined SEM/AFM nanoprobe. The examination includes imaging at least a portion of the non-target region with the scanning electron microscope part of the SEM/AFM nanoprobe in a first step, imaging at least a portion of the target region only with the atomic force microscope part of the SEM/AFM nanoprobe in a subsequent step, and recording, in a further subsequent step, current/voltage curves as characteristic electrical curves at the contact points with the nanoprobe, or performing a conductive AFM technique.

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Patent Owner(s)

Patent OwnerAddress
FORSCHUNGSZENTRUM JUELICH GMBHFACHBEREICH PATENTE JUELICH 52425

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheperanov, Vasily Juelich, DE 1 0
Voigtlaender, Bert Juelich, DE 3 4

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