Coated active cantilever probes for use in topography imaging in opaque liquid environments, and methods of performing topography imaging

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United States of America Patent

PATENT NO 11906546
APP PUB NO 20220244288A1
SERIAL NO

17623789

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Abstract

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Active cantilever probes having a thin coating incorporated into their design are disclosed. The probes can be operated in opaque and/or chemically harsh environments without the need of a light source or optical system and without being significantly negatively impacted by corrosion. The probes include a substrate that has a cantilever, a thermomechanical actuator associated with the cantilever, a piezoresistive stress sensor disposed on the cantilever, and a thin coating disposed on the cantilever and the piezoresistive stress sensor. The coating is bonded to the substrate, is thermally conductive, and has a low thermal resistance. Further, the thin coating is configured to have little to no impact on one or more of a mass of the active probe, a residual stress of the cantilever, or a stiffness of the active probe. Techniques for performing topography and making other measurements in an opaque and/or chemically harsh environment are also provided.

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Patent Owner(s)

Patent OwnerAddress
MASSACHUSETTS INSTITUTE OF TECHNOLOGY77 MASSACHUSETTS AVENUE CAMBRIDGE MA 02139
NANO ANALYTIK GMBH98693 ILLMENAU
SYNFUELS AMERICAS CORPORATION14 PIDGEON HILL DRIVE SUITE 300 STERLING VA 20165

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Holz, Mathias Llmenau, DE 1 0
Ivanov, Tzvetan Llmenau, DE 4 12
Rangelow, Ivo Baunatal, DE 14 100
Reuter, Christoph Llmenau, DE 1 0
Wang, Yi Cambridge, US 1349 14754
Xia, Fangzhou Cambridge, US 3 2
Yang, Chen Cambridge, US 191 455
Youcef-Toumi, Kamal Cambridge, US 43 508

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