Arrangement Having a Measuring Apparatus for a Scanning Probe Microscope, Scanning Probe Microscope, and Method for Operating
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United States of America Patent
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Issued Date -
Aug 4, 2022
app pub date -
Jun 18, 2020
filing date -
Jun 18, 2019
priority date (Note) -
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Abstract
The invention relates to an arrangement having a measuring apparatus for a scanning probe microscope, comprising: a sample receptacle, which is designed to receive a measurement sample for an examination by scanning probe microscopy; a measuring probe, which is received on a probe holder; a relocating device, which has a drive and is designed to relocate the sample receptacle and the probe holder having the measuring probe relative to each another by means of the drive for the examination by scanning probe microscopy; and an active counterweight device having a counterweight and a drive device associated with the counterweight, the active counterweight device being designed to move the counterweight during the measuring operation by means of the drive device, counter to the movement of the probe holder having the measuring probe. The invention furthermore relates to a method for operating the arrangement.
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