HETEROGENEOUSLY INTEGRATED OPTICAL MODULATOR AND MANUFACTURING METHOD THEREOF

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United States of America Patent

APP PUB NO 20220236618A1
SERIAL NO

17519424

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Abstract

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Disclosed are a heterogeneously integrated optical modulator and a manufacturing method thereof. The modulator includes a substrate having a trench, an input waveguide disposed at one side of the trench, an output waveguide disposed at the other side of the trench, a first Mach-Zehnder interferometer including first branch waveguides disposed between the input waveguide and the output waveguide and a heater disposed on one of the first branch waveguides, and second Mach-Zehnder interferometers connected to each of the first branch waveguides.

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Patent Owner(s)

Patent OwnerAddress
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE(GAJEONG-DONG) 218 GAJEONG-RO YUSEONG-GU DAEJEON 34129 34129

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
BAEK, Yongsoon Daejeon, KR 49 287
HAN, Young-Tak Daejeon, KR 46 293
KIM, Seoktae Daejeon, KR 12 115
LEE, Seo Young Daejeon, KR 18 59
PARK, Sang Ho Daejeon, KR 244 1574
SHIN, Jang Uk Daejeon, KR 37 213
YUN, Seok Jun Daejeon, KR 3 1

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