Electrostatic Device and Method for Manufacturing Electrostatic Device
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United States of America Patent
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Issued Date -
Jul 14, 2022
app pub date -
Mar 19, 2020
filing date -
Jun 6, 2019
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Abstract
This vibration-driven energy harvesting element includes a fixed part, a movable part, an elastic support part that is integrally formed with the movable part and that elastically supports the movable part, and a glass base part in which the fixed part and the elastic support part are anodically bonded to each other in a separated state.
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