Interferometric measurement device and interferometric method for determining the surface topography of a measurement object

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United States of America Patent

PATENT NO 12104896
APP PUB NO 20220221272A1
SERIAL NO

17610028

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Abstract

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The invention relates to an interferometric measurement device and to an interferometric method for determining the surface topography of a measurement object (1). The essence of the invention is that the light intensities Iq(zi) of at least one other detector element q of the multi-element detector (6) are also used besides the light intensities Ip(zi) of this detector element to determine the value zp associated with a detector element p (6b) of the measurement device.

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POLYTEC GMBH76337 WALDBRONN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Schmid, Henrik Keltern-Ellmendingen, DE 1 0
Seyfried, Volker Nussloch, DE 59 619

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