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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
TOSOH CORPORATION	4560 KAISEI-CHO SHUNAN-SHI YAMAGUCHI 7468501 ?7468501
SAGAMI CHEMICAL RESEARCH INSTITUTE	2743-1 HAYAKAWA AYASE-SHI KANAGAWA 252-1193

International Classification(s)

• C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
• C07F:ACYCLIC, CARBOCYCLIC, OR HETEROCYCLIC COMPOUNDS CO....

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• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
CHIBA, Hirokazu	Ayase-shi, Kanagawa, JP	7	15
FUKAWA, Marina	Ayase-shi, Kanagawa, JP	2	0
SUGIMOTO, Shun	Ayase-shi, Kanagawa, JP	19	49
TANAKA, Ryoji	Ayase-shi, Kanagawa, JP	44	198

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
3.5 Year Payment	$1600.00	$800.00	$400.00	Jan 7, 2026
7.5 Year Payment	$3600.00	$1800.00	$900.00	Jan 7, 2030
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Jan 7, 2034

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 3.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2022/0213,129

SILICON OXIDE FILM, MATERIAL FOR GAS BARRIER FILM, AND METHOD FOR PRODUCING SILICON OXIDE FILM

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