Induction Coil Assembly for Plasma Processing Apparatus
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United States of America
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Issued Date -
Jun 30, 2022
app pub date -
Dec 14, 2021
filing date -
Dec 14, 2021
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Abstract
An induction coil assembly is disclosed including two induction coils. Each induction coil includes a first winding commencing from a first terminal end in a first position in the z-direction and transitioning to a radially inner position in a plane normal to the z-direction and a second winding commencing from the radially inner position and transitioning to a radially outer position in a second plane normal to the z-direction and terminating in a second terminal end. Plasma processing apparatuses incorporating the induction coil assembly are also provided.
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