ELECTRON EMITTER AND METHOD OF FABRICATING SAME

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United States of America Patent

APP PUB NO 20220189725A1
SERIAL NO

17549854

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Abstract

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Electron emitters and methods of fabricating the electron emitters are disclosed. According to certain embodiments, an electron emitter includes a tip with a planar region having a diameter in a range of approximately (0.05-10) micrometers. The electron emitter tip is configured to release field emission electrons. The electron emitter further includes a work-function-lowering material coated on the tip.

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ASML NETHERLANDS B VHOLLAND WEIDE EINDHOVEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
CHEN, Zhong-wei San Jose, US 53 745
DOU, Juying San Jose, US 21 169
FAN, Zheng Beijing, CN 12 16
KUO, Tzu-Yi Hsinchu City, TW 8 3

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