HYBRID GROWTH METHOD FOR III-NITRIDE TUNNEL JUNCTION DEVICES

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United States of America Patent

APP PUB NO 20220181513A1
SERIAL NO

17539345

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A hybrid growth method for III-nitride tunnel junction devices uses metal-organic chemical vapor deposition (MOCVD) to grow one or more light-emitting or light-absorbing structures and ammonia-assisted or plasma-assisted molecular beam epitaxy (MBE) to grow one or more tunnel junctions. Unlike p-type gallium nitride (p-GaN) grown by MOCVD, p-GaN grown by MBE is conductive as grown, which allows for its use in a tunnel junction. Moreover, the doping limits of MBE materials are higher than MOCVD materials. The tunnel junctions can be used to incorporate multiple active regions into a single device. In addition, n-type GaN (n-GaN) can be used as a current spreading layer on both sides of the device, eliminating the need for a transparent conductive oxide (TCO) layer or a silver (Au) mirror.

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THE REGENTS OF THE UNIVERSITY OF CALIFORNIA1111 FRANKLIN STREET 12TH FLOOR OAKLAND CA 94607-5200

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
DenBaars, Steven P Goleta, US 283 10468
Leonard, John T San Jose, US 8 63
Margalith, Tal Santa Barbara, US 17 245
Nakamura, Shuji Santa Barbara, US 480 22357
Speck, James S Santa Barbara, US 183 7189
Yonkee, Benjamin P Goleta, US 7 29
Young, Erin C Mountain View, US 13 184

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