APPARATUS AND METHOD FOR EXAMINING AND/OR PROCESSING A SAMPLE
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United States of America Patent
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Issued Date -
Jun 9, 2022
app pub date -
Feb 25, 2022
filing date -
Feb 25, 2022
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Abstract
The present invention relates to an apparatus for examining and/or processing a sample, said apparatus comprising: (a) a scanning particle microscope for providing a beam of charged particles, which can be directed on a surface of the sample; and (b) a scanning probe microscope with a deflectable probe; (c) wherein a detection structure is attached to the deflectable probe.
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