GAS SUPPLY BLOCK AND SUBSTRATE-PROCESSING APPARATUS INCLUDING THE SAME
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United States of America Patent
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Issued Date -
May 26, 2022
app pub date -
Nov 2, 2021
filing date -
Nov 2, 2021
priority date (Note) -
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Abstract
A gas supply block may include a first block, a second block and a third block. The first block may include a first gas inlet passage configured to supply a first process gas. The second block may include a second gas inlet passage configured to supply a second process gas. The third block may be combined with the first block and the second block. The third block may be configured to diffuse and supply the first process gas and the second process gas into gas supply lines connected to the processing spaces.
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