PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR FORMING RESIST PATTERN, AND METHOD FOR PRODUCING PLATED FORMED PRODUCT

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United States of America Patent

APP PUB NO 20220146932A1
SERIAL NO

17438962

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention is a photosensitive resin composition including an alkali-soluble resin (A), a polymerizable compound (B), a photoradical polymerization initiator (C), and a solvent (D), in which the polymerizable compound (B) contains at least one kind (B1) selected from a compound represented by the following formula (1) and a compound represented by the following formula (3), having specific Rs, and a content ratio of the compound (B1) contained in the photosensitive resin composition is 15 to 50% by mass. The photosensitive resin composition of the present invention can form a thick-film resist pattern having excellent sensitivity and resolution, and by using the thick-film resist pattern, a plated formed product can be miniaturized.

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Patent Owner(s)

Patent OwnerAddress
JSR CORPORATIONTOKYO JAPAN

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HORIKAWA, Shuhei Minato-ku, Tokyo, JP 1 0
KOUMURA, Kazuhiko Minato-ku, Tokyo, JP 4 11
NODA, Hiroto Minato-ku, Tokyo, JP 3 48
OGAWA, Taku Minato-ku, Tokyo, JP 7 17

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