A MICROWAVE WINDOW INCLUDING FIRST AND SECOND PLATES WITH VERTICAL STEPPED AREAS CONFIGURED FOR PRESSURE SEALING A DIELECTRIC PLATE BETWEEN THE FIRST AND SECOND PLATES
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United States of America
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Issued Date -
May 5, 2022
app pub date -
Oct 30, 2020
filing date -
Oct 30, 2020
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Abstract
Apparatus for transmitting microwaves into a process chamber using a microwave pressure window assembly. The microwave pressure window assembly may include a first plate with a first aperture surrounded by a first recess for a first pressure seal, a second plate with a second aperture surrounded by a second recess for a second pressure seal, a dielectric plate configured to transmit microwaves and interposed between the first plate and the second plate and between the first pressure seal and the second pressure seal. The apertures include a first vertical step area on a first vertical side of the apertures and a second vertical step area on a second vertical side of the apertures opposite of the first vertical side. The first vertical step areas and the second vertical step areas may have a thickness of approximately 50% of a thickness of the plates that includes a dielectric plate recess.
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