METHOD, DEVICE, AND NON-TRANSITORY COMPUTER READABLE MEDIUM FOR DETERMINING TIMING OF REMOVING SUBSTRATE FROM CASSETTE IN SUBSTRATE PROCESSING DEVICE, AND SUBSTRATE PROCESSING DEVICE
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United States of America
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May 5, 2022
app pub date -
Oct 4, 2021
filing date -
Oct 4, 2021
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Abstract
Provided is a method, device, and program for determining a timing of removing a substrate from a cassette in substrate processing device, and substrate processing device. In the method, a tentative removal time point of each substrate is calculated by adding a transfer time to a tentative removal time point of the one previous substrate, wherein the transfer time is required from the start of an action of removing a substrate from the cassette to the end of an action of delivering the substrate to an exchanger.
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