PARTICLE BEAM SYSTEM AND THE USE THEREOF FOR FLEXIBLY SETTING THE CURRENT INTENSITY OF INDIVIDUAL PARTICLE BEAMS
Number of patents in Portfolio can not be more than 2000
United States of America
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May 5, 2022
app pub date -
Jan 11, 2022
filing date -
Jan 11, 2022
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Abstract
A particle beam system and, such as a multi-beam particle microscope, can have a current intensity of individual particle beams that is flexibly set over large value ranges without structural modifications. The particle beam system can include a condenser lens system, a pre-multi-lens array with a specific pre-counter electrode and a pre-multi-aperture plate, and a multi-lens array. The system can includes a controller to supply adjustable excitations to the condenser lens system and the pre-counter electrode so that the charged particles are incident on the pre-multi-aperture plate in telecentric manner.
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