Mems Beam Structure and Mems Vibration-Driven Energy Harvesting Element
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United States of America
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Issued Date -
Apr 28, 2022
app pub date -
Jan 14, 2020
filing date -
Jan 14, 2020
priority date (Note) -
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Abstract
This MEMS beam structure that elastically supports a movable section displaced in a first direction includes: a first beam section and a second beam section extending in a second direction orthogonal to the first direction; and a linking section that connects the tip of the first beam section and the tip of the second beam section that is connected to the movable section, wherein the first beam section and the second beam section each have a shape as a beam of uniform strength, and the beam section root of the second beam section is displaced relatively in the first direction with respect to the beam section root of the first beam section according to the displacement of the movable section in the first direction.
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