Torsion Wing Probe Assembly
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Apr 7, 2022
app pub date -
Sep 13, 2021
filing date -
Sep 13, 2021
priority date (Note) -
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Abstract
A torsional probe for a metrology instrument includes a cantilever coupled to a support structure via a torsion bar. The cantilever, support structure, and arms of torsion bar have substantially the same thickness. A method of manufacture of the torsion probe, as well as a method of using the torsion probe to measure photothermal induced surface displacement of a sample are also described.
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