THERMALLY TUNED OPTICAL DEVICES CONTAINING CHALCOGENIDE THIN FILMS
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United States of America
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Mar 31, 2022
app pub date -
Sep 29, 2021
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Sep 29, 2021
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Abstract
Tunable devices and methods for fine tuning the optical responses of thin film devices post fabrication are described. This approach modifies the refractive indices of the chalcogenide glass thin films incorporated into the devices, and using this change in the refractive indices to fine tune the optical responses of the devices. Thermal annealing may be used to modify the refractive index. Thermal annealing provides good uniformity in large-area devices and may be applied to multi-layer structures.
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