ELECTROSTATIC CHUCK AND SUBSTRATE FIXING DEVICE
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Mar 17, 2022
app pub date -
Sep 9, 2021
filing date -
Sep 9, 2021
priority date (Note) -
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Abstract
An electrostatic chuck includes a plurality of ceramic substrates each having a step formed at a peripheral edge portion of one surface, the ceramic substrates being arranged adjacent to each other so that the steps face each other, electrodes each embedded in each of the plurality of ceramic substrates, and a filling portion that fills a groove portion formed by the facing steps of the adjacent ceramic substrates.
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