Importance

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Abstract

A method for manufacturing at least one micromechanical device includes:

providing a first and a separate second substrate, each having two surfaces spaced parallel to each other with a predetermined thickness;patterning a first trench structure into one of the two surfaces of the first substrate, and a second trench structure into one of the two surfaces of the second substrate;arranging the patterned surfaces of the two substrates with respect to each other such that a substrate stack with an upper and a lower surface is defined and the first and/or second trench structure forms at least one cavity therein;thinning the substrate stack from its upper and/or lower surface;exposing the at least one cavity by patterning a recess into the upper and/or lower surface of the substrate stack,wherein exposing the at least one cavity is performed after arranging the two substrates into the substrate stack.

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First Claim