SOLID-STATE POWER AMPLIFIERS WITH COOLING CAPABILITIES
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United States of America
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Issued Date -
Mar 3, 2022
app pub date -
Sep 2, 2020
filing date -
Sep 2, 2020
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Abstract
Methods and apparatus for processing a substrate. For example, a processing chamber can include a power source, an amplifier connected to the power source, comprising at least one of a gallium nitride (GaN) transistor or a gallium arsenide (GaAs) transistor, and configured to amplify a power level of an input signal received from the power source to heat a substrate in a process volume, and a cooling plate configured to receive a coolant to cool the amplifier during operation.
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