SCANNING PROBE MICROSCOPE, SCAN HEAD AND METHOD
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United States of America
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Feb 24, 2022
app pub date -
Dec 3, 2019
filing date -
Dec 3, 2019
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Abstract
The present invention relates to a scan head for a scanning probe microscope arranged for moving a probe including a conductive cantilever relatively to a substrate surface, the head comprising: a first electrode positioned such that a capacitor is formed across a gap between the first electrode and a second electrode, wherein the second electrode is formed by the conductive cantilever; a voltage source for actuating the conductive cantilever by applying a voltage to the capacitor; and at least a first resistor arranged in series between the voltage source and one of the first and second electrodes such as to form an RC circuit for damping a vibration of the cantilever.
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