CHEMICAL LIQUID APPLICATION APPARATUS AND VISCOSITY ADJUSTMENT BOTTLE
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United States of America
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Issued Date -
Feb 24, 2022
app pub date -
Mar 12, 2021
filing date -
Mar 12, 2021
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Abstract
A chemical liquid application apparatus according to one embodiment includes: a processing unit which applies a chemical liquid to a substrate; and a viscosity adjustment unit including a viscosity adjustment bottle which mixes a chemical liquid and a diluent. The viscosity adjustment bottle includes a first introduction port into which the chemical liquid is introduced, a second introduction port into which the diluent diluting the chemical liquid is introduced, a porous body which is connected to the first and second introduction ports and includes a plurality of holes through which the chemical liquid and the diluent introduced from the first and second introduction ports flow, and a discharge port which is connected to the porous body and from which the mixture of the chemical liquid and the diluent is discharged.
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