CHEMICAL PRECURSOR BUBBLER ASSEMBLY WITH ROUTING STRUCTURE
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United States of America
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Issued Date -
Feb 24, 2022
app pub date -
Aug 24, 2020
filing date -
Aug 24, 2020
priority date (Note) -
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Abstract
A bubbler apparatus may include a container, a lid, a sealing member and at least one routing member. As the lid is tightened to the container and the sealing member is compressed, the routing member(s) does not contact the inside bottom surface of the container. Instead, there is a small gap between the routing member and the bottom surface of the container. The routing member may compress the substance in the container that the gas is saturated with or may slice through the substance.
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