METHOD FOR MANUFACTURING RUTHENIUM WIRING
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United States of America Patent
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Feb 17, 2022
app pub date -
Aug 5, 2021
filing date -
Aug 5, 2021
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Abstract
A method for manufacturing a ruthenium wiring including (i) treating a metal surface including ruthenium using a first chemical solution including a compound having a functional group capable of coordinating to a ruthenium atom, and (ii) carrying out an etching treatment on the metal surface including ruthenium treated with the first chemical solution, using a second chemical solution.
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