System and method for atomic layer deposition of rare-earth oxides on optical grade materials for laser gain media

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United States of America Patent

PATENT NO 12031210
APP PUB NO 20220042172A1
SERIAL NO

16988217

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Abstract

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A method is disclosed for doping a quantity of powder particles. A container having a central chamber is initially charged with a quantity of powder particles. A quantity of precursor is sublimed to form a heated precursor. A quantity of carrier gas is mixed with the precursor to form a mixture of heated precursor/carrier gas. The central chamber is charged with the heated precursor/carrier gas and then moved to cause interaction of the powder particles with the heated precursor/carrier gas to form a first monolayer coating on the powder particles. The heated precursor/carrier gas is then removed from the central chamber and the central chamber is charged with a O2/O3 gas under a plasma. The central chamber is then further moved to produce interaction of the O2/O3 gas with the first monolayer coating on the powder particles to modify the first monolayer coating to create a different, single monolayer coating forming an oxide coating on the powder particles.

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Patent Owner(s)

Patent OwnerAddress
LAWRENCE LIVERMORE NATIONAL SECURITY LLC7000 EAST AVENUE LIVERMORE CA 94550

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Elhadj, Selim Livermore, US 12 32
Miller, John S Walnut Creek, US 45 1565
Spinka, Thomas M Livermore, US 5 13

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