MEASUREMENT SYSTEM AND MEASUREMENT METHOD
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United States of America
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Issued Date -
Feb 3, 2022
app pub date -
Aug 2, 2021
filing date -
Aug 2, 2021
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Abstract
A measurement method of receiving an emission light output from an optical semiconductor element on an incident end surface of an optical probe, shifts a relative position between the optical semiconductor element and the optical probe on a plane surface intersecting with an optical axis of the emission light, measures an incident intensity of the emission light at several positions, and obtains an incident intensity pattern showing a relationship between a change in the relative position and the respective incident intensities.
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