METHODS AND SYSTEMS FOR RADIOFREQUENCY PLASMA PLUME GENERATION
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United States of America
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Jan 27, 2022
app pub date -
Jul 27, 2021
filing date -
Jul 27, 2021
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Abstract
A system and method for plasma treatment comprises a radiofrequency chamber, a microwave source configured to provide energy to the radiofrequency chamber, a reaction chamber configured to accept a treatment flow, a plasma dispensation assembly configured in the reaction chamber, the plasma dispensation assembly being powered by energy from the radiofrequency chamber, and a collection chamber for collecting treated material from the reaction chamber. The systems and methods can be used for treatment of various treatment flows.
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