SIGNAL ENHANCEMENT STRUCTURE AND MANUFACTURING METHOD THEREOF
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United States of America
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Jan 6, 2022
app pub date -
Jul 2, 2021
filing date -
Jul 2, 2021
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Abstract
A signal enhancement structure configured to enhance a signal of a specimen is provided. The signal enhancement structure includes a plurality of nanowires stacked in a first direction, a second direction, and a third direction. The nanowires are extended along at least two directions. A particle of the specimen is on the nanowires or in a gap among the nanowires. A manufacturing method of a signal enhancement structure is also provided.
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