COOLING DEVICE, SEMICONDUCTOR MANUFACTURING APPARATUS, AND SEMICONDUCTOR MANUFACTURING METHOD

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20210404711A1
SERIAL NO

17355345

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A cooling device includes a circulation system configured to circulate a refrigerant in a condenser so as to return the refrigerant to the condenser via a pump, a heater, a throttle valve, and a vaporizer; and a cooling system that includes a heat exchanger arranged in the condenser. The condenser includes a first portion where the refrigerant is present in a liquid state and a second portion where the refrigerant is present in a gas state, and at least a portion of the heat exchanger is arranged in the second portion.

First Claim

See full text

Other Claims data not available

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHATOKYO

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nomoto, Makoto Tochigi, JP 19 71

Cited Art Landscape

Load Citation

Patent Citation Ranking

  • 0 Citation Count
  • F25B Class
  • 0 % this patent is cited more than
  • 4 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges6922603101 - 1011 - 2031 - 40050100150200250300350400450500550600650700750

Forward Cite Landscape

Load Citation