FREQUENCY TRACKING FOR SUBSURFACE ATOMIC FORCE MICROSCOPY

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United States of America

APP PUB NO 20210389345A1
SERIAL NO

17287825

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Abstract

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A method and system for performing subsurface atomic force microscopy measurements, the system comprising: a signal source for generating an drive signal; a transducer configured to receive the drive signal for converting the drive signal into vibrational waves and coupling said vibrational waves into a stack comprising a sample for interaction with subsurface features within said sample; cantilever tip for contacting the sample for measuring surface displacement resulting from the vibrational waves to determine subsurface features; wherein the system includes a measurement device for measuring a measurement signal returning from the transducer during and/or in between the subsurface atomic force microscopy measurements.

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Patent Owner(s)

Patent OwnerAddress
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNOANNA VAN BUERENPLEIN 1 'S-GRAVENHAGE 2595 DA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
MEIJER, TIMMERMAN THIJSSEN Rutger San Jose, US 4 1
SADEGHIAN, MARNANI Hamed Nootdorp, NL 60 47
VAN, ES Maarten Hubertus Voorschoten, NL 23 21
VAN, NEER Paul Louis Maria Joseph Bergschenhoek, NL 38 20
VAN, RIEL Martinus Cornelius Johannes Maria 's-Gravenzande, NL 5 0

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