FLUID SUPPLY SYSTEM, FLUID CONTROL DEVICE, AND SEMICONDUCTOR MANUFACTURING DEVICE
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
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N/A
Issued Date -
Dec 16, 2021
app pub date -
Oct 3, 2019
filing date -
Oct 3, 2019
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
A fluid supply system includes: fluid lines, fluid controllers and joints, in which each of the fluid lines linearly extends in an extension direction that substantially perpendicularly intersects an alignment direction of the fluid lines, each of the fluid controllers is disposed in an aligned manner in the alignment direction with connection surfaces directed to the same direction, a diameter of the pipings is equal to or less than a surface width of the connection surfaces in the alignment direction, and diameters of the joints are equal to or greater than the surface width, and the pipings that are adjacent to each other in the alignment direction are positioned with the joints displaced from each other in the extension direction.
First Claim
Other Claims data not available