METHOD FOR DETERMINING CLEANLINESS OF CLEANING MEMBER, METHOD FOR DETERMINING ADSORPTION CHARACTERISTICS OF CONTAMINANTS THAT CONTAMINATE CLEANING MEMBER, METHOD FOR DETERMINING CLEANLINESS OF SUBSTRATE, PROGRAM FOR DETERMINING CLEANLINESS OF SUBSTRATE, AND PROGRAM FOR DETERMINING END POINT OF CLEANING PROCESS
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United States of America
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Dec 9, 2021
app pub date -
May 18, 2021
filing date -
May 18, 2021
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Abstract
In a method for determining cleanliness of a cleaning member that contacts a substrate and with which scrub cleaning is performed, the method includes a first step of self-cleaning a cleaning member by releasing contaminants from the cleaning member into a cleaning liquid, and a second step of bringing a self-cleaning discharged liquid into contact with an electrode of a crystal oscillator, attaching the contaminants contained in the discharged liquid onto the electrode of the crystal oscillator, then measuring a frequency response of the crystal oscillator in which the contaminants are attached onto the electrode, and determining cleanliness of the cleaning member based on the measured frequency response.
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